| 发明名称 |
METHODS FOR FABRICATING HIGH ASPECT RATIO PROBES AND DEFORMING HIGH ASPECT RATIO NANOPILLARS AND MICROPILLARS |
| 摘要 |
Methods for fabricating of high aspect ratio probes and deforming micropillars and nanopillars are described. Use of polymers in deforming nanopillars and micropillars is also described.
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| 申请公布号 |
US2010215543(A1) |
申请公布日期 |
2010.08.26 |
| 申请号 |
US20100712097 |
申请日期 |
2010.02.24 |
| 申请人 |
HENRY MICHAEL D;HOMYK ANDREW P;SCHERER AXEL;TOMBRELLO THOMAS A;WALAVALKAR SAMEER |
发明人 |
HENRY MICHAEL D.;HOMYK ANDREW P.;SCHERER AXEL;TOMBRELLO THOMAS A.;WALAVALKAR SAMEER |
| 分类号 |
G01N33/00;B05D5/12;C40B50/18;G03F7/20 |
主分类号 |
G01N33/00 |
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