| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce of annual ring marks or the like of an optical disk and the like. <P>SOLUTION: In a polishing method, a rear surface 1b to be a surface to be polished of a stamper 1 that is a member to be polished contacts with a lapping plate 32 demarcated by a chamber 15 and polishes the rear surface 1b by the rotation of the lapping plate 32. The stamper 1 is pressed to the lapping plate 32 by introducing compressed air set gauge pressure to 0.01-0.5 MPa in the chamber 15. The Ra value of the rear surface 1b of the stamper 1 is made to be 0.02 or lower by rotating the lapping plate 32 and setting gauge pressure of pressurized fluid fed into the chamber 15 to 0.01-0.5 MPa. <P>COPYRIGHT: (C)2010,JPO&INPIT |
