发明名称 Shared contact structure, semiconductor device and method of fabricating the semiconductor device
摘要 A shared contact structure, semiconductor device and method of fabricating the semiconductor device, in which the shared contact structure may include a gate electrode disposed on an active region of a substrate and including facing first and second sidewalls. The first sidewall may be covered with an insulating spacer. The source/drain regions may be formed within the active region adjacent the first sidewall, and provided on the opposite side of the second sidewall. A corner protection pattern may be formed adjacent the source/drain regions and the insulating spacer, and covered by an inter-layer dielectric. A shared contact plug may be formed through the inter-layer dielectric, to be in contact with the gate electrode, corner protection pattern and source/drain regions.
申请公布号 US7781282(B2) 申请公布日期 2010.08.24
申请号 US20060377455 申请日期 2006.03.17
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 YOO ABRAHAM;KANG HEE-SUNG;SHIN HEON-JONG
分类号 H01L21/8238 主分类号 H01L21/8238
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