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发明名称
Method for transferring substrate in process of aligning the substrate in semiconductor apparatus and semiconductor apparatus
摘要
申请公布号
KR100977582(B1)
申请公布日期
2010.08.23
申请号
KR20080022947
申请日期
2008.03.12
申请人
发明人
分类号
H01L21/677;H01L21/68
主分类号
H01L21/677
代理机构
代理人
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