发明名称 |
OPTICAL CORRECTION DEVICE |
摘要 |
The disclosure relates to an optical correction device with thermal actuators for influencing the temperature distribution in the optical correction device. The optical correction device is constructed from at least two partial elements which differ with regard to their ability to transport heat. Furthermore, the disclosure relates to methods for influencing the temperature distribution in an optical element.
|
申请公布号 |
US2010201958(A1) |
申请公布日期 |
2010.08.12 |
申请号 |
US20100700122 |
申请日期 |
2010.02.04 |
申请人 |
CARL ZEISS SMT AG |
发明人 |
HAUF MARKUS;SCHOENHOFF ULRICH;TAYEBATI PAYAM;THIER MICHAEL;HEIL TILMANN;FLUEGGE OLE;KAZI ARIF;SAUERHOEFER ALEXANDER;FOCHT GERHARD;WEBER JOCHEN;GRUNER TORALF;GOEHNERMEIER AKSEL;HELLWEG DIRK |
分类号 |
G03B27/52;G02B7/02 |
主分类号 |
G03B27/52 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|