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发明名称
Purified silicon production system
摘要
申请公布号
EP1288163(A3)
申请公布日期
2010.08.04
申请号
EP20020019313
申请日期
2002.08.28
申请人
MIDWEST RESEARCH INSTITUTE
发明人
WANG, TIHU;CISZEK, THEODORE J.
分类号
C01B33/02;C01B33/039;C23C16/24;C23C16/44;C23C16/448;C23C16/458;C23C16/46;C23C16/54;C30B25/02;H01L21/20;H01L21/205;H01L21/285;H01L31/04
主分类号
C01B33/02
代理机构
代理人
主权项
地址
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