| 摘要 |
<p>PURPOSE: An X-ray detector and a manufacturing method thereof are provided to stably attach a scintillator to a photoelectric conversion substrate by forming an adhesive layer with uniform thickness on only necessary region. CONSTITUTION: A photoelectric conversion substrate comprises a photoelectric conversion region and a pad region. A thin film transistor unit and a photoelectric conversion unit are formed on a photoelectric conversion region. A pad region surrounds the photoelectric conversion region. A sealing member(300) is formed between the photoelectric conversion region and the pad region to surround the photoelectric conversion region. The sealing member includes thermosetting resin or photo-curable resin. An adhesive layer(400) is formed on the photoelectric conversion region surrounded with the sealing member. A scintillator(500) is attached to the photoelectric conversion substrate with the adhesive layer.</p> |
