| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a biaxial or triaxial gyroscope satisfactory in sensitivity. <P>SOLUTION: An integrated microelectromechanical structure 30 includes: a die 2, having a substrate 2a and a frame 2b, defining inside it a detection region 2c and having a first side extending along a first horizontal axis x; a driving mass 3, anchored to the substrate 2a, set in the detection region 2c, and rotatable in a plane xy with an actuation movement about a vertical axis z; and first and second pairs 16a', 16b' and 16c', 16d' of sensing masses, suspended inside the driving mass 3 via elastic supporting elements 20 so as to be fixed with respect thereto and so as to perform a detection movement of rotation out of the plane xy in response to a first angular velocity; wherein the sensing masses of the first pair 16a', 16b' and the sensing masses of the second pair 16c', 16d' are aligned in respective directions, having non-zero inclinations of opposite sign with respect to the first horizontal axis x. <P>COPYRIGHT: (C)2010,JPO&INPIT |
