发明名称 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 A method of manufacturing a semiconductor device includes a bonding step of bonding a chip on a wiring board by means of a bonding layer, and a wire bonding step of bonding a wire to a pad on the chip while applying ultrasonic vibration after the bonding step. A material having an elastic modulus of 100 MPa or higher at a process temperature in the wire bonding step is used as the bonding layer.
申请公布号 US2010167468(A1) 申请公布日期 2010.07.01
申请号 US20090648276 申请日期 2009.12.28
申请人 RENESAS TECHNOLOGY CORP. 发明人 SHIMOKAWA HIROHISA;IZUMI NAOKI
分类号 H01L21/607 主分类号 H01L21/607
代理机构 代理人
主权项
地址