| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a substrate for manufacturing a substrate by precisely positioning a main substrate to which an auxiliary substrate is attached to a prescribed position. <P>SOLUTION: In the manufacturing method of the substrate, initially, a pattern is formed on a front surface of the main substrate 1 and an alignment mark 7 is formed. Then, the auxiliary substrate 9 is stuck to the front surface of the main substrate 1. Under a state that a mask 15 is positioned on the formed alignment mark 7, an exposure process is applied to a back surface of the main substrate 1 through the mask 15 to form a pattern on the back surface of the main substrate 1. When the pattern is formed on the back surface of the main substrate 1, the auxiliary substrate 9 is separated form the main substrate 1. <P>COPYRIGHT: (C)2010,JPO&INPIT |
