发明名称 THIN FILM TRANSISTOR ARRAY SUBSTRATE AND METHOD OF FABRICATING THE SAME
摘要 A thin film transistor (TFT) array substrate is provided. The thin film transistor (TFT) array substrate includes an insulating substrate, an oxide semiconductor layer formed on the insulating substrate and including an additive element, a gate electrode overlapping the oxide semiconductor layer, and a gate insulating layer interposed between the oxide semiconductor layer and the gate electrode, wherein the oxygen bond energy of the additive element is greater than that of a base element of the oxide semiconductor layer.
申请公布号 US2010155721(A1) 申请公布日期 2010.06.24
申请号 US20090645433 申请日期 2009.12.22
申请人 LEE JE-HUN;IHN TAE-HYUNG;LEE DONG-HOON;KIM DO-HYUN 发明人 LEE JE-HUN;IHN TAE-HYUNG;LEE DONG-HOON;KIM DO-HYUN
分类号 H01L29/786;H01L21/34 主分类号 H01L29/786
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