发明名称 |
Transport pod with protection by the thermophoresis effect |
摘要 |
A transport pod (1) of the invention for a mask or a semiconductor wafer (2) comprises a leakproof peripheral wall (3) surrounding an inside space (4) receiving the mask or the semiconductor wafer (2). Thermally conductive support means (11) hold the mask or the semiconductor wafer (2). A cold plate (7) thermally coupled to a cold source (8) generates a temperature gradient facing the main face (6) of the mask or the semiconductor wafer (2) that is to be protected against particulate pollution. The cold plate (7) is held by connection means (7b) including thermal insulation means (7c). An on-board energy source (9) powers the cold source (8). This significantly reduces deposition of polluting particles on the main face (6) of the mask or the semiconductor wafer (2).
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申请公布号 |
US7735648(B2) |
申请公布日期 |
2010.06.15 |
申请号 |
US20050109783 |
申请日期 |
2005.04.20 |
申请人 |
ALCATEL |
发明人 |
RIVAL JEAN-LUC;KAMBARA HISANORI;BERNARD ROLAND |
分类号 |
B65G49/07;H01L21/673 |
主分类号 |
B65G49/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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