THICK FILM FOR CERAMIC GAS SENSOR, THE MANUFACTURING METHOD THEREOF AND GAS SENSOR USING IT

摘要

PURPOSE: A thick film element for a ceramic gas sensor, a manufacturing method thereof, and a gas sensor using the same are provided to improve sensitivity compared to a hetero-junction ceramic gas sensor by mechanical bonding while simplifying the structure. CONSTITUTION: A manufacturing method of a thick film element for a ceramic gas sensor(10) comprises the steps of: preparing p-type semiconducting ceramic powder(12) and n-type semiconducting ceramic powder(13), mixing the powder to prepare compound powder(11), converting the compound powder into aerosol, and spraying the aerosol on a substrate(16) to obtain a composite thick film of p- and n-type semiconducting ceramic powder.