FAN FILTER UNIT CONTROL SYSTEM AND METHOD FOR SUPPLYING AIRFLOW

摘要

PURPOSE: A fan filter unit control system and an air flow supplying method are provided to minimize the environmental variation inside the chamber module by adjusting an air flow controller according to a value fed back through a sensor in real time. CONSTITUTION: A chamber module(150) treats the process. A fan filter unit(110) is installed on the top of the chamber module. The fan filter unit supplies the air current to the chamber module. A sensor(155) collects data on the air current supplied from the fan filter unit. A main controller(160) receives the data on the air flow and controls the fan filter unit. An air flow controller adjusts the amount of the air flow according to the control of the main controller.