发明名称 MULTIFUNCTIONAL VACUUMIZING DEVICE
摘要 <p>A multifunctional vacuumizing device has a working valve connected to a vacuum valve by a communicating pipe. Vacuum pumps (2,3) are communicated with a working chamber (1) comprising at least one vacuum channel that is communicated with the vacuum valve by a communicating pipe. A gas manometer (64) is communicated with the vacuum valve by a communicating pipe. The vacuum pumps and the working chamber are located in a supporting structure (4). The vacuum pump, the vacuum valve and the working valve are controlled by a programmable logic controller via an electromagnetic valve.</p>
申请公布号 WO2010060337(A1) 申请公布日期 2010.06.03
申请号 WO2009CN74746 申请日期 2009.11.02
申请人 WEN, JINXUAN 发明人 WEN, JINXUAN
分类号 F04B37/14;F04B41/06;F04B49/00;F04B49/02;H01L21/00 主分类号 F04B37/14
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