| 摘要 |
PURPOSE: An image sensor and a method of manufacture thereof combine the hydrogen ion in the part caused by the annihilation of the electronics. The loss of the electronics which becomes with the light is controlled, it improves. CONSTITUTION: The photo diode(104) is formed in the pixel region. The inter-layer insulating film(110) and metal wiring(120) are formed on the top of the photo diode. The photoresist pattern opening the pixel region on the top of the inter-layer insulating film is formed. The hydrogen ion is inserted in the pixel region by using the photoresist pattern as the ion implantation mask. The hydrogen domain is at least formed among the around photo diode and inside in one.
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