| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor tester that reduce a time period used by a controller as much as possible so as to reduce a time period necessary for transmission of data for performing various initial setting processes required for testing a DUT. Ž<P>SOLUTION: This semiconductor tester 1 is provided with: a tester controller 10 that outputs compressed pattern data obtained by compressing pattern data to be stored in a pattern memory 24, and a control processing section 23. The control processing section 23 is provided with: a pattern extraction control section 42 that extracts the compressed pattern data output from the tester controller 10; a pattern load control section 44 that writes the pattern data extracted by the pattern extraction control section 42 into the pattern memory 24; and a process completion notification section 46b that outputs a process completion signal S2 to the tester controller 10 when at least one of a process by the pattern extraction control section 42 and a process by the pattern load control section 44, is completed. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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