| 摘要 |
PROBLEM TO BE SOLVED: To provide a speaker diaphragm material having a wide reproduction-frequency band. SOLUTION: A step of forming a diaphragm is configured as follows. Be having a large acoustic velocity and a light specific gravity is vapor-phase grown on a substrate, molded into a prescribed shape, so as to form the diaphragm by removing the substrate by etching. Diffusion of Be from the substrate is prevented by mounting a barrier layer on the substrate. Abnormal growth of Be is suppressed by inserting an intermediate layer during film-formation in the step of the vapor-phase growth. A diamond film is coated so as to impart strong compression stress to the Be coating in which the crystal growth orientation is controlled. Consequently, it is possible to produce a speaker having a wide reproduction-frequency band. COPYRIGHT: (C)2010,JPO&INPIT
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