| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for evaluating the shape of an object in which the congruence transformation between a measurement point group and a reference point group is properly performed, even when the measurement error of a specific area is large, due to the conditions on measurement techniques of a measurement device, and as a result, the object shape evaluation of the measurement object is performed properly. SOLUTION: The device of evaluating the shape of the object aligns the measurement points and the reference points, on the basis of sequential convergence processing for sequential convergence of the distance between many measurement points corresponding to the shape of the measurement object and many reference points corresponding to the reference shape of the measurement object, and evaluates the shape of the measurement object, on the basis of the measurement point data and the reference point data after the alignment. In the alignment processing, an inter-adjacent-point distance weight coefficient is determined, on the basis of the inter-adjacent-point distance between adjacent measurement points, or the inter-adjacent-point distance between the adjacent reference points, and the inter-adjacent-point distance weight coefficient is used, when a sequential convergence evaluation value in the sequential convergence processing is to be obtained. COPYRIGHT: (C)2010,JPO&INPIT |
