Evaporation source and vacuum deposition apparatus using the same

摘要

An evaporation source machine (130) and a vacuum deposition apparatus using the same, including a vacuum chamber (110), a crucible (140), a heater (150), and a multi-layered inner plate (160) positioned inside the crucible. Each layer of the multi-layered inner plate (160) has at least one aperture (162, 163), such that evaporated material may be discharged from a bottom of the crucible (140) through the multi-layered inner plate (160) into the vacuum chamber (110).