| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve such a problem that exclusive developing devices are each formerly required for colors, respectively, and, when one of the devices stops its operation in a processing process R, G and B, processing can not be also made to other substrates for the other colors to consequently shorten operation time, and when the color of a resist on a substrate sent from an upstream process is different from information from a CIM (Common Information Model), such a situation can not be coped with, and furthermore a developer can not be exchanged with good timing. <P>SOLUTION: The color of a resist applied on a substrate is detected, and processing for development is made on the basis of the detected color. A substrate pre-treated by exposure or the like is selectively processed by a plurality of developing processing devices. Further, the state of the resist, which remains after the development and cleaning processing, is detected, and a plurality of feeding parts are selected. <P>COPYRIGHT: (C)2010,JPO&INPIT |
