Negativ arbeitende strahlungsempfindliche Harzzusammensetzung,申请号DE2000643838-传众专利搜索

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发明名称	Negativ arbeitende strahlungsempfindliche Harzzusammensetzung
摘要
申请公布号	DE60043838(D1)	申请公布日期	2010.04.01
申请号	DE2000643838	申请日期	2000.12.22
申请人	JSR CORP.	发明人	KAI, TOSHIYUKI;WANG, YONG;KUSUMOTO, SHIROU;OHTA, YOSHIHISA
分类号	G03F7/038;H01L21/027;G03F7/004	主分类号	G03F7/038
代理机构		代理人
主权项
地址

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