| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a ceramic heater suppressing the thinning or disconnection of a migration preventing conductor even if used for a long time and keeping the effect of the migration preventing conductor to be enhanced in reliability, a sensor element having the same, and a sensor. <P>SOLUTION: The ceramic heater 150 includes a first ceramic substrate 160, the heater 180 laminated on the first ceramic substrate and equipped with a heating part 181 and a pair of the heating lead parts 182 and 183 extending from the heating part 181, the second ceramic substrate 170 stacked to the first ceramic substrate so as to hold the heater 180, and the migration preventing conductor 190 stacked on the side opposite to the heater 180 of the second ceramic substrate 170 and held to potential lower than the positive potential sides 182 of a pair of the heating lead parts 182 and 183. The migration preventing conductor 190 contains 20 mass% or above of Pd. <P>COPYRIGHT: (C)2010,JPO&INPIT |
