CATHODE WITH INNER AND OUTER ELECTRODES AT DIFFERENT HEIGHTS
摘要
An apparatus for generating uniform plasma across and beyond the peripheral edge of a substrate has a dielectric body with an upper electrode and an annular electrode embedded therein. The outer perimeter of the upper electrode overlaps the inner perimeter of the annular electrode. In one embodiment, the upper electrode and the annular electrode are electrically coupled by molybdenum vias. In one embodiment, the upper electrode is coupled to a DC power source to provide electrostatic force for chucking the substrate. In one embodiment, the upper electrode is coupled to an RF source for exciting one or more processing gasses into plasma for substrate processing.
申请公布号
WO2010008711(A3)
申请公布日期
2010.03.11
申请号
WO2009US46994
申请日期
2009.06.11
申请人
APPLIED MATERIALS, INC.;HOFFMAN, DANIEL, J.;BUCHBERGER, DOUGLAS, A.;KATS, SEMYON, L.;KATZ, DAN
发明人
HOFFMAN, DANIEL, J.;BUCHBERGER, DOUGLAS, A.;KATS, SEMYON, L.;KATZ, DAN