COMPOUND, METHOD FOR PRODUCING THE COMPOUND AND RESIST COMPOSITION CONTAINING THE COMPOUND

摘要

PURPOSE: A compound is provided to fully exploit autocatalytic reactions in which a strong acid is released anew through efficient decomposition by the action of the acid. CONSTITUTION: A compound is represented by formula (I) or (I'), wherein Z1 and Z2 independently represent a hydrogen atom, a C1 to C12 alkyl group or a C3 to C12 cyclic saturated hydrocarbon group, provided that at least one of Z1 and Z2 represents a C1 to C12 alkyl group or a C3 to C12 cyclic saturated hydrocarbon group; rings Y1 and Y2 independently represents an optionally substituted C3 to C20 alicyclic hydrocarbon group; and Q1 to Q4 independently represent a fluorine atom or a C1 to C6 perfluoroalkyl group, wherein Q'1 to Q'4 independently represent a fluorine atom or a C1 to C6 perfluoroalkyl group; and m and n independently represent an integer of 0 to 5.