| 摘要 |
PURPOSE: A lift pin structure and a substrate treating apparatus with the same are provided to combine the lift pin with a pin holder by using a magnetic force. CONSTITUTION: A lift pin structure comprises a lift pin(112), a first magnet, a pin holder(120), and a second magnet. The lift pin is contacted to the substrate, and supports the substrate. The first magnet is combined with the bottom of the lift pin. The lift pin is inserted into an internal space of the pin holder. The second magnet is installed in lower part of the internal space. The lift pin is combined with the pin holder through attraction between the first magnet and the second magnet.
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