发明名称 CIRCUIT DESIGN, INSPECTION METHOD, AND PROCESSING METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a reusable circuit design for use with computer design automation tools in designing integrated circuits, as well as reticle inspection and fabrication methods that are based on such a circuit design. <P>SOLUTION: The circuit design (250, 300) is stored on a computer readable medium and contains an electronic representation of a layout pattern (260, 258, 302) for at least one layer of the circuit design on an integrated circuit. The layout pattern includes a flagged critical region which corresponds to a critical region (256, 304) on a reticle or integrated circuit that is susceptible to special inspection or fabrication procedures. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2010044414(A) 申请公布日期 2010.02.25
申请号 JP20090259144 申请日期 2009.11.12
申请人 KLA-TENCOR CORP 发明人 GLASSER LANCE A;YE JUN;JUANG SHAUH-TEH;ALLES DAVID S;WILEY JAMES N
分类号 G03F1/00;H01L21/027 主分类号 G03F1/00
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