摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a reusable circuit design for use with computer design automation tools in designing integrated circuits, as well as reticle inspection and fabrication methods that are based on such a circuit design. <P>SOLUTION: The circuit design (250, 300) is stored on a computer readable medium and contains an electronic representation of a layout pattern (260, 258, 302) for at least one layer of the circuit design on an integrated circuit. The layout pattern includes a flagged critical region which corresponds to a critical region (256, 304) on a reticle or integrated circuit that is susceptible to special inspection or fabrication procedures. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |