摘要 |
<p><P>PROBLEM TO BE SOLVED: To more easily widen a gap between a mirror substrate and an electrode substrate. <P>SOLUTION: The gap between the mirror substrate 1900 and the electrode substrate 2000 is formed by a rib structure 2010 and a gap auxiliary layer 2101. In other words, the mirror substrate 1900 and the electrode substrate 2000 are joined to each other via the gap auxiliary layer 2101 and the rib structure 2010. In this way, the mirror substrate 1900 and the electrode substrate 2000 are separated from each other by the gap auxiliary layer 2101 and the rib structure 2010, and the excellent effect of being able to widen the gap between the mirror substrate 1900 and the electrode substrate 2000 more easily can be obtained. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |