| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To efficiently guide solvent gas-containing air, which is produced from a solvent tank 1 filled with a solvent of which the vaporized gas like PFC has a specific gravity higher than air, to a solvent recovery device 6 to recover it. <P>SOLUTION: The solvent tank 1 includes a double tank structure comprising inner and outer tanks 3 and 4 provided so as to leave a gap S therebetween and the gap S is connected to a solvent recovery device 6 having suction force. Then, the solvent tank 1 is covered with a lid 9 in a state that the lid 9 becomes larger than the inner tank 3 at the upper position of the upper end edge 3a of the inner tank 3 and becomes small with respect to the upper end edge 4b of the outer tank 4 so that the solvent tank has a gap A to form an air stream of open air passing through the gap A to flow through the gap S and this air stream is utilized to guide vaporized gas-containing air to the solvent recovery device 6. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
