| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer transfer container which is superior in low dust producing properties. SOLUTION: The wafer transfer container comprises a box-like container body 11 for storing a plurality of semiconductor wafers, a rack 12 for holding semiconductor wafers with intervals, and a lid 13, which is detachably attached to an opening part 11a formed on the container body 11. The bottom surface 11d of the container body 11 is provided with a slider 20 for aligning the container body 11, by abutting against a guide pin of a placement stage, when the container body 11 is placed on a transfer stage of a processing device. The slider 20 is made of PTFE or PBT, in a separate body from the container body 11. COPYRIGHT: (C)2010,JPO&INPIT |
