| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an apparatus for cleaning an object to be treated capable of efficiently discharging and filtrating a cleaning liquid without allowing the cleaning liquid to stay in a second treatment tank. <P>SOLUTION: Upon completing the submerged cleaning treatment of the object A to be treated, a fluorinated solvent C stored in a second treatment tank 2B is discharged downward through a discharge path 2f connected to the bottom of the second treatment tank 2B and is fed into a liquid storage tank 7 making use of its own weight. Since a stream of the fluorinated solvent C can be formed between the second treatment tank 2B and the liquid storage tank 7 in line with the gravity, the whole of the fluorinated solvent C can be fed into the liquid storage tank 7 without allowing the fluorinated solvent C to stay in the angular corners of the second treatment tank 2B and the like. Thus, the time needed for discharging and filtrating the whole of the fluorinated solvent C is shortened, the operation efficiency is enhanced, and high-leveled filtration can be carried out. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
