| 摘要 |
PROBLEM TO BE SOLVED: To inspect the electric characteristics of an object under inspection with high precision and stably. SOLUTION: An elastic contact part 13 is provided on the underside of a grounded conductor part 12. The elastic contact part 13 includes an insulating layer 15, a wiring layer 16, a contact 17, and an elastic body 18 provided on a position corresponding to the contact 17. The elastic body 18 provides the elastic contact part 13 with elasticity for allowing it to make contact with an electrode P. The elastic contact part 13 is arranged to be parallel to the grounded conductor part 12. The wiring layer 16 and the grounded conductor part 12 form a microstrip line. COPYRIGHT: (C)2010,JPO&INPIT |
