| 摘要 |
PROBLEM TO BE SOLVED: To provide a micropump easy to mold and machine and miniaturizable. SOLUTION: The micropump 1 comprises: a chamber 3 formed in a base 2; a chamber nozzle 4 formed in the chamber 3; a chamber driving part 5 for increasing/reducing the volume of the chamber 3; an outflow channel 7 formed in the direction of the center axis of the chamber nozzle 4; an inflow channel 9 formed along a direction different from the flowing-out direction of the outflow channel 7; an outflow nozzle 6 of the outflow channel 7; an inflow nozzle 8 of the inflow channel 9 and a chamber nozzle 4 arranged with their openings facing the same crossing space part 10; and an avoiding space part 16 provided in the inflow channel 9 for avoiding the collision with flowing-in fluid when part of the fluid discharged from the chamber nozzle 4 passes through the inflow channel 9. The inflow channel 9 and the outflow channel 7 are different from each other in flow path resistance so that the flow path resistance of the former is lower than that of the latter. COPYRIGHT: (C)2010,JPO&INPIT |
