| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To effectively cool a plate member while avoiding structural complication. <P>SOLUTION: In a temperature regulation apparatus, a plurality of blow headers 34 are arranged in parallel with each other, discharge headers 36 are formed between them, each blow header 34 and its corresponding discharge header 36 have sides the face and back of which are shared with each other along the longitudinal direction, each blow header 34 is open to the side of a header base 32 and has a blow port 35 on the side of a glass base 20, each discharge header 36 is closed to the side of the header base 32 and is open to the side of the glass base 20, and the header base 32 supports the blow headers 34 and the discharge headers 36 and is open to the side of the blow headers 34. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
