| 摘要 |
Disclosed herein is a deposition apparatus with a guide roller arrangement (110) for a long superconducting tape. The deposition apparatus has a supply reel (10) which is provided in a vacuum chamber and rotated to supply the tape, a feed and deposition unit (100) which is spaced apart from the supply reel and vacuum deposits a superconducting layer on the tape while feeding the tape, and a collection reel (20) which is spaced apart from the feed and deposition unit and is rotated to collect the vacuum-deposited tape. The feed and deposition unit includes a drum (30) which is rotated to wind the tape on a predetermined portion of an outer circumference of the drum several times, thus feeding the tape, and the guide roller arrangement which is spaced apart from the drum, includes first and second guide rollers (111,112) each having on an outer circumference thereof grooves and protrusions at regular intervals, and being inclined at a predetermined angle with respect to a rotating shaft of the drum, with the tape passing over an outer circumference of the guide rollers. The invention deposits a superconducting layer while maintaining constant tension when the tape is thermally deposited, thus preventing the tape from being deformed because of the difference in the thermal expansion and contraction of the tape resulting from non-uniform tension.
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