发明名称 |
FLEXIBLE PIEZORESISTIVE INTERFACIAL SHEAR AND NORMAL FORCE SENSOR AND SENSOR ARRAY |
摘要 |
A force sensor includes a polymeric substrate including a cavity with a tilt plane, at least two metal piezoresistors on the tilt plane, and a contact pad connected to the metal piezoresistors. The tilt plane may include a measured interface of from 15° to 75°.
|
申请公布号 |
US2009282930(A1) |
申请公布日期 |
2009.11.19 |
申请号 |
US20080123179 |
申请日期 |
2008.05.19 |
申请人 |
CHENG CHING-HSIANG;CHAO CHEN |
发明人 |
CHENG CHING-HSIANG;CHAO CHEN |
分类号 |
G01L1/22;H01C17/28 |
主分类号 |
G01L1/22 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|