| 摘要 |
An object of the present invention is to provide a controller of a three-axis tool unit which can compensate for mutual interference caused by the dynamic behaviors of three axes for operating a tool in three directions orthogonal to one another. The controller of the three-axis tool unit of the present invention includes a noninteracting control section which calculates, by using transfer functions, correction values for compensating for mutual interference caused by the dynamic behaviors of a first mechanism including a first actuator, a tool holder, and the tool, a second mechanism including a second actuator, the tool holder, and the tool, and a third mechanism including a third actuator, the tool holder, and the tool, and corrects the target displacements of the first, second, third actuators by using the correction values, the transfer functions indicating mutual influence of the dynamic behaviors of the first, second, and third mechanisms.
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