| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a tarbular body carrying device, in which an amount of suspended particles of dust in a carrying path of a tabular body can be reduced, and to provide its control method. Ž<P>SOLUTION: The carrying device comprises top plates 4 forming the carrying path of a glass substrate 1, and jets fluid from a plurality of holes 5 formed on the top plates 4 to float at least a part of the glass substrate 1. The carrying device further comprises: a jetting/sucking device 6 jetting fluid from the plurality of holes 5 of the top plates 4 onto a carrying path side, or sucking the fluid onto a side opposite to the carrying path side; a positional sensor 7 detecting a position of the glass substrate 1; and a control device 3 making the jetting/sucking device 6 perform jetting operation when determining that there is a glass plate 1 on any of the top plates 4 based on a detection result of the positional sensor 7, and making the jetting/sucking device 6 perform sucking operation when determining that there is no glass plate 1 on any of the top plates 4 based on the detection result of the positional sensor 7. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
|
