发明名称 A FIN FET AND A METHOD OF MANUFACTURING A FIN FET
摘要 <p>A fin field effect transistor (300), the fin field effect transistor (300) comprising a substrate (302), a fin (304) formed on the substrate (302) along a fin alignment direction (306), a control gate (308) formed partially over the fin (304) and partially on the substrate (302) along a gate alignment direction (310) which differs from the fin alignment direction (306), and a spacer (312) of a uniform thickness covering a vertical sidewall of the control gate (308) adjacent the fin (304).</p>
申请公布号 WO2009130629(A1) 申请公布日期 2009.10.29
申请号 WO2009IB51413 申请日期 2009.04.03
申请人 NXP B.V.;PAWLAK, BARTLOMIEJ 发明人 PAWLAK, BARTLOMIEJ
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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