发明名称 MULTI-BEAM MICRO-MACHINING SYSTEM AND METHOD
摘要 <p>A system for delivering energy to a substrate including a dynamically directable source of radiant energy providing a plurality of beams of radiation, each propagating in a dynamically selectable direction. Independently positionable beam steering elements in a plurality of beam steering elements are operative to receive the beams and direct them to selectable locations on the substrate.</p>
申请公布号 KR20090108652(A) 申请公布日期 2009.10.15
申请号 KR20097018128 申请日期 2002.06.13
申请人 发明人
分类号 G02B26/08;B23K26/04;B23K26/06;B23K26/073;B23K26/14;B23K26/38;B23K26/382;B23K26/402;B23K101/42;G02B27/14;G02F1/33;H01S3/00;H01S3/11;H05K3/00 主分类号 G02B26/08
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