| 摘要 |
Provided is a fluid controller wherein fine adjustment of a small flow volume can be easily made and a desired small flow volume can be set by a user. A setting means (12) is provided for setting a position where a small flow volume piston stops when the piston is moved upward. The setting means is provided with a small flow volume adjusting screw (31) screwed into a penetrating screw hole (15a) arranged on a top wall (15) of a casing (4) so that a void exists between the through hole and an upper end surface on a valve shaft (5); a taper section (32) formed on a leading end section of the small flow volume adjusting screw (31); a stopper piston (33), wherein an upper surface is provided with a taper section (34) facing the taper section (32) at a prescribed interval, and a lower surface (33a) regulates an upper stop position of a small flow volume piston (8); and a plurality of force transmitting spherical bodies (35), which are arranged between the taper section (32) of the small flow volume adjusting screw (31) and the taper section (34) of the stopper piston (33) and transmit a force between the taper sections. |
