APPARATUS FOR PROCESSING SUBSTRATE WITH PLASMA,申请号KR20060020614-传众专利搜索

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发明名称	APPARATUS FOR PROCESSING SUBSTRATE WITH PLASMA
摘要
申请公布号	KR100920427(B1)	申请公布日期	2009.10.08
申请号	KR20060020614	申请日期	2006.03.03
申请人		发明人
分类号	H01L21/3065	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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