| 摘要 |
A micro mirror device includes a hinge supported upon a substrate. The hinge has a length and a width substantially parallel to an upper surface of the substrate, and has a thickness substantially perpendicular to the upper surface of the substrate. The thickness is larger than the width. A mirror plate is tiltable around the hinge. The hinge can produce an elastic restoring force on the mirror plate when the mirror plate tilts away from an un-tilted position.
|
