| 摘要 |
PROBLEM TO BE SOLVED: To provide a method in which a color conversion layer having no leakage to an adjacent sub-pixel and a uniform film thickness can be formed at low cost and with high precision by using an injection method. SOLUTION: In the method of manufacturing a color conversion filter substrate, formation of a first bank layer and selective formation of recesses and projections on a planarization layer 50 positioned between adjacent bank layers 60 are performed in the same process by containing inorganic particles in the planarization layer 50, and by using a material by which a first matrix in the planarization layer 50 and a second matrix constituting a first bank material are etched by the same etching gas when banks are formed by a dry etching method. COPYRIGHT: (C)2010,JPO&INPIT |
