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发明名称
Apparatus for Manufacturing semiconductor
摘要
申请公布号
KR100919214(B1)
申请公布日期
2009.09.28
申请号
KR20070138115
申请日期
2007.12.27
申请人
发明人
分类号
H01L21/677;H01L21/673
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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