AUTONOMOUS ADAPTIVE SEMICONDUCTOR MANUFACTURING

摘要

Autonomous biologically based learning tool systems and methods that the tool systems employ for learning and analysis are provided. An autonomous biologically based learning tool system includes (a) one or more tool systems that perform a set of specific tasks or processes, and generate assets and data related to the assets that characterize the various processes and associated tool performance; (b) an interaction manager that receives and formats data, and (c) an autonomous learning system based on biological principles of learning, such system comprises a memory platform and a processing platform that are defined recursively and communicate through a network. Autonomous tool systems can be deployed recursively to assemble increasingly complex autonomous tools. Knowledge generated and accumulated in the autonomous learning system(s) associated with individual or assembled complex autonomous tools can be cast into semantic networks that can be employed for learning and driving tool goals based on context.