发明名称 OPTICAL MEMBER, EXPOSURE DEVICE, AND DEVICE MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide an optical member that improves fidelity of a reproduction image and diffraction efficiency while suppressing illuminance unevenness. <P>SOLUTION: The optical member forms a reproduction image composed of a plurality of localized images. The optical member includes a first optical element part wherein a plurality of sub-units, respectively in which a plurality of computer generated holograms forming each of the plurality of images are combined so as to form the reproduction image, are arrayed, and a second optical element part that reduces coherency of light beams, respectively passing through at least two sub-units adjacent to each other, in the light beams passing through the first optical element part. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009212152(A) 申请公布日期 2009.09.17
申请号 JP20080051110 申请日期 2008.02.29
申请人 CANON INC 发明人 MATSUBARA ISAO
分类号 H01L21/027;G03F7/20;G03H1/08 主分类号 H01L21/027
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