| 发明名称 |
INTEGRATED ABSOLUTE AND DIFFERENTIAL PRESSURE TRANSDUCER |
| 摘要 |
A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide virtual absolute pressure measurements over a wide range of pressures on a single integrated scale.
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| 申请公布号 |
US2009228219(A1) |
申请公布日期 |
2009.09.10 |
| 申请号 |
US20090353201 |
申请日期 |
2009.01.13 |
| 申请人 |
MKS INSTRUMENTS, INC. |
发明人 |
DOZORETZ PAUL;GU YOUFAN;HOLCOMB GARRY;WENZEL OLE |
| 分类号 |
G01F23/14;G01L13/00;G01L27/00 |
主分类号 |
G01F23/14 |
| 代理机构 |
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代理人 |
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