发明名称 Method for Fabricating A Flat Panel Display
摘要 The method for fabricating a flat panel display includes performing a first crystallization process to re-crystallize an amorphous silicon layer on a glass substrate to make the amorphous silicon layer become a polysilicon layer, forming a patterned absorbing layer to cover an active area pattern of a driving TFT and to expose portions of the polysilicon layer, performing a second crystallization process to re-crystallization the exposed portions of the polysilicon layer so that the exposed portions of the polysilicon layer has a different grain structure from the grain structure of the driving TFT, removing the patterned absorbing layer, and removing portions of the polysilicon layer to form an active area of the driving TFT and an active area of a switching TFT area in the exposed portions of the polysilicon layer of each sub-pixel.
申请公布号 US2009215212(A1) 申请公布日期 2009.08.27
申请号 US20090434032 申请日期 2009.05.01
申请人 TPO DISPLAYS CORP. 发明人 LIU CHUN-YEN;TSENG CHANG-HO
分类号 H01L21/20 主分类号 H01L21/20
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