| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor capable of improving a temperature characteristic, improving sensitivity, and acquiring output having high linearity to input of acceleration. SOLUTION: This acceleration sensor 10 has an oscillation part 12 equipped with the first piezoelectric vibration piece 16, a 90°phase shift part 20 for changing a phase of an output signal from the oscillation part by 90°and outputting it, a phase shift circuit part 22 having a series circuit comprising the second piezoelectric vibration piece 24 and a resistance provided on the output side of the 90°phase shift part 20, and a phase shift change output part 45 for outputting a signal corresponding to a phase difference between both output signals based on an output signal from the phase shift circuit part 22 and an output signal from the oscillation part 12. The sensor has a constitution having the resistance forming the series circuit with the second piezoelectric vibration piece 24. COPYRIGHT: (C)2009,JPO&INPIT
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